The PHI 5800 X-ray photoelectron spectrometer (XPS) is equipped with a dual source anode (Al and Mg), a hemispherical analyzer for XPS and Auger electron spectroscopy (AES) analysis, including ...
The PHI VersaProbe XPS Microprobe is a multi-technique, ultra-high vacuum surface analysis instrument that is capable of producing focused, highly monochromatic X-ray beam that can be scanned over a ...
The Perkin-Elmer sputtering tool has the ability to have up to three 8” targets loaded at once. The tool uses an RF power source for sputtering and currently has argon, oxygen, and nitrogen gases for ...
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